JPH021857U - - Google Patents
Info
- Publication number
- JPH021857U JPH021857U JP8009188U JP8009188U JPH021857U JP H021857 U JPH021857 U JP H021857U JP 8009188 U JP8009188 U JP 8009188U JP 8009188 U JP8009188 U JP 8009188U JP H021857 U JPH021857 U JP H021857U
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- power supply
- vacuum
- power source
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8009188U JPH021857U (en]) | 1988-06-16 | 1988-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8009188U JPH021857U (en]) | 1988-06-16 | 1988-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021857U true JPH021857U (en]) | 1990-01-09 |
Family
ID=31304936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8009188U Pending JPH021857U (en]) | 1988-06-16 | 1988-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021857U (en]) |
-
1988
- 1988-06-16 JP JP8009188U patent/JPH021857U/ja active Pending
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